DUV light source sustainability achievements and next steps

Yzzer Roman; Ted Cacouris; Kumar Raja Guvindan Raju; Dinesh Kanawade; Walt Gillespie; Siqi Luo; Eric Mason; David Manley; Saptaparna Das

doi:10.1117/12.2299387

21 March 2018 DUV light source sustainability achievements and next steps

Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, Saptaparna Das

Author Affiliations +

Proceedings Volume 10587, Optical Microlithography XXXI; 1058716 (2018) https://doi.org/10.1117/12.2299387
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Key sustainability opportunities have been executed in support of corporate initiatives to reduce the environmental footprint and decrease the running cost of DUV light sources. Previously, substantial neon savings were demonstrated over several years through optimized gas management technologies. Beyond this work, Cymer is developing the XLGR 100, a self-contained neon recycling system, to enable minimal gas consumption. The high efficiency results of the XLGR 100 in a production factory are validated in this paper.

Cymer has also developed new light source modules with 33% longer life in an effort to reduce raw and associated resource consumption. In addition, a progress report is included regarding the improvements developed to reduce light source energy consumption.

Citation Download Citation

Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, and Saptaparna Das "DUV light source sustainability achievements and next steps", Proc. SPIE 10587, Optical Microlithography XXXI, 1058716 (21 March 2018); https://doi.org/10.1117/12.2299387

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available