0.16-µm BCD single-photon avalanche diode with 30-ps timing jitter, high detection efficiency, and low noise

Mirko Sanzaro; Paolo Gattari; Federica Villa; Alberto Tosi; Giuseppe Croce; Franco Zappa

doi:10.1117/12.2304851

14 May 2018 0.16 μm BCD single-photon avalanche diode with 30 ps timing jitter, high detection efficiency and low noise

Mirko Sanzaro, Paolo Gattari, Federica Villa, Alberto Tosi, Giuseppe Croce, Franco Zappa

Proceedings Volume 10659, Advanced Photon Counting Techniques XII; 106590D (2018) https://doi.org/10.1117/12.2304851
Event: SPIE Commercial + Scientific Sensing and Imaging, 2018, Orlando, FL, United States

Abstract

CMOS SPADs are nowadays an established imaging technology for applications requiring single-photon sensitivity in a compact form-factor (e.g. three-dimensional LIDAR imaging and fluorescence lifetime FLIM microscopy). However, we aimed at further enhance overall SPAD performances, by exploiting smart power technologies, such as the BCD (Bipolar-CMOS-DMOS) one. We achieved the present state-of-the-art SPADs fabricated in the 0.16 μm BCD technology by STMicroelectronics, attaining >60% photon detection efficiency at 500 nm, dark count rate density < 0.2 cps/μm², and less than 30 ps FWHM timing jitter.

Citation Download Citation

Mirko Sanzaro, Paolo Gattari, Federica Villa, Alberto Tosi, Giuseppe Croce, and Franco Zappa "0.16 μm BCD single-photon avalanche diode with 30 ps timing jitter, high detection efficiency and low noise", Proc. SPIE 10659, Advanced Photon Counting Techniques XII, 106590D (14 May 2018); https://doi.org/10.1117/12.2304851

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