Polarization effects in 3D femtosecond direct laser writing nanolithography

Simonas Varapnickas; Sima Rekštytė; Darius Gailevičius; Etienne Brasselet; Saulius Juodkazis; Mangirdas Malinauskas

doi:10.1117/12.2306904

22 May 2018 Polarization effects in 3D femtosecond direct laser writing nanolithography

Simonas Varapnickas, Sima Rekštytė, Darius Gailevičius, Etienne Brasselet, Saulius Juodkazis, Mangirdas Malinauskas

Proceedings Volume 10675, 3D Printed Optics and Additive Photonic Manufacturing; 106750V (2018) https://doi.org/10.1117/12.2306904
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

In this work we reveal an influence of polarization of the laser beam on polymerization in direct laser writing. It was experimentally found that the width of suspended lines fabricated in SZ2080, OrmoComp and PETA (pentaerythritol triacrylate) pre-polymers directly depends on the incident polarization and is largest when the angle between the electric field vector and the sample translation direction is α = 90° and the smallest when α = 0°. The size of polymerized structures is consistent with theoretical simulations based on vectorial Debye theory. Experiments were performed by using average laser power corresponding to the middle value of the fabrication window. Polarization was found to be affecting feature sizes while structuring various widespread photoresists, the observed variation was material dependent and measured from 5 to 22% in the line-width. The performed study proves that polarization can be used as a variable parameter for fine tuning of the voxel's aspect ratio.

Citation Download Citation

Simonas Varapnickas, Sima Rekštytė, Darius Gailevičius, Etienne Brasselet, Saulius Juodkazis, and Mangirdas Malinauskas "Polarization effects in 3D femtosecond direct laser writing nanolithography", Proc. SPIE 10675, 3D Printed Optics and Additive Photonic Manufacturing, 106750V (22 May 2018); https://doi.org/10.1117/12.2306904

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