MEMS and micro sensor

Yan Hong; Yanbin Cai

doi:10.1117/12.2307141

20 February 2018 MEMS and micro sensor

Yan Hong, Yanbin Cai

Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 1069759 (2018) https://doi.org/10.1117/12.2307141
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China

Abstract

This paper briefly introduces the concept of mems (micro-electro-mechanical system), analyzes the importance and some application in the aerospace field. Finally, this paper also discussed the mems in space application recommendations.

Citation Download Citation

Yan Hong and Yanbin Cai " MEMS and micro sensor ", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 1069759 (20 February 2018); https://doi.org/10.1117/12.2307141

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