Characterization of the microlithography and mercury drop methods to generate PDI's

J. A. Zenteno-Hernández; F. S. Granados-Agustín; D. Aguirre-Aguirre; B. Villalobos-Mendoza; M. E. Percino-Zacarías; P. Rosales-Quintero; A. Cornejo-Rodriguez

doi:10.1117/12.2320812

14 September 2018 Characterization of the microlithography and mercury drop methods to generate PDI's

J. A. Zenteno-Hernández, F. S. Granados-Agustín, D. Aguirre-Aguirre, B. Villalobos-Mendoza, M. E. Percino-Zacarías, P. Rosales-Quintero, A. Cornejo-Rodriguez

Author Affiliations +

Proceedings Volume 10742, Optical Manufacturing and Testing XII; 107421E (2018) https://doi.org/10.1117/12.2320812
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of λ/20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.

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J. A. Zenteno-Hernández, F. S. Granados-Agustín, D. Aguirre-Aguirre, B. Villalobos-Mendoza, M. E. Percino-Zacarías, P. Rosales-Quintero, and A. Cornejo-Rodriguez "Characterization of the microlithography and mercury drop methods to generate PDI's", Proc. SPIE 10742, Optical Manufacturing and Testing XII, 107421E (14 September 2018); https://doi.org/10.1117/12.2320812

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