Study of the role of the interface on the defect density in HfO2 films using STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage)

Luke A. Emmert; Sebastian Töpfer; Thomas Willemsen; Marco Jupé; Detlev Ristau; Wolfgang Rudolph

doi:10.1117/12.2500291

16 November 2018 Study of the role of the interface on the defect density in HfO₂ films using STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage)

Luke A. Emmert, Sebastian Töpfer, Thomas Willemsen, Marco Jupé, Detlev Ristau, Wolfgang Rudolph

Author Affiliations +

Proceedings Volume 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference; 108052H (2018) https://doi.org/10.1117/12.2500291
Event: SPIE Laser Damage, 2018, Boulder, Colorado, United States

Abstract

The defect densities controlling the LIDT of three HfO₂ films with different underlying interfaces were measured using STEREO-LID. This technique measures the actual damage fluence during a 1-on-1 test. The films were tested with pulses of ~10 ns duration at 1064 nm. The 30-nm HfO₂ films were prepared by ion-beam sputtering: the first was deposited directly on a fused silica substrate; the second was deposited after first laying down a half-wave buffer layer of SiO₂; the third was deposited on a half-wave SiO₂ buffer with a gradual transition to HfO₂. The buffer layer reduces the density of defects triggering damage at low fluence by more than a factor of two, but the gradual interface slightly adds to the defect density. The implications of these results are compared to the damage behavior of a thicker (quarter-wave) HfO₂ film.

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Luke A. Emmert, Sebastian Töpfer, Thomas Willemsen, Marco Jupé, Detlev Ristau, and Wolfgang Rudolph "Study of the role of the interface on the defect density in HfO₂ films using STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage)", Proc. SPIE 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 108052H (16 November 2018); https://doi.org/10.1117/12.2500291

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KEYWORDS

Interfaces

Hybrid fiber optics

Laser induced damage

Silica

Laser optics

Multilayers

Absorption

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