CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10818 > Article
Paper
8 November 2018 Method for measuring the spatial characteristics of high-resolution diffraction gratings
M. V. Shishova, S. B. Odinokov, A. Y. Zherdev, V. V. Popov
Author Affiliations +
Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 108180J (2018) https://doi.org/10.1117/12.2500899
Event: SPIE/COS Photonics Asia, 2018, Beijing, China
Abstract
That paper focuses on indirect measurements of the diffraction gratings by analyzing their scattered distribution. The method is based on pre-calculated numerical dependencies of the energy characteristics. The comparison of measured diffraction efficiency values with numerical simulations provide the inverse measurements of the profile height. Presented research belongs to the field of scatterometry of high-resolution diffraction optical elements. The concept is tested with polymeric sinusoidal relief. Considered phase diffraction gratings have interest in field of linear displacement encoders.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
M. V. Shishova, S. B. Odinokov, A. Y. Zherdev, and V. V. Popov "Method for measuring the spatial characteristics of high-resolution diffraction gratings", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180J (8 November 2018); https://doi.org/10.1117/12.2500899
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 5 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction
Diffraction gratings
Scatterometry
Dielectric polarization
Atomic force microscopy
Analytical research
Numerical analysis
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top