Selection of frequency domain filter based on match of different location-specific points

Dong Wei; Kenta Enoki; Masato Aketagawa

doi:10.1117/12.2500637

2 November 2018 Selection of frequency domain filter based on match of different location-specific points

Dong Wei, Kenta Enoki, Masato Aketagawa

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108191F (2018) https://doi.org/10.1117/12.2500637
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

This study presents an algorithm for automatic selection of a frequency domain filter for the Fourier transform method of interference fringe analysis in a pulse-train interferometer. In this approach, the equality between the interference-fringe envelope peak point and the phase-crossing point of different frequency components is used to distinguish between the signal and noise in the frequency domain. The efficacy of the proposed technique is demonstrated by numerical experiments.

Citation Download Citation

Dong Wei, Kenta Enoki, and Masato Aketagawa "Selection of frequency domain filter based on match of different location-specific points", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191F (2 November 2018); https://doi.org/10.1117/12.2500637

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