An on-machine non-contact form measurement method for the high steepness elements

Xingtong Fei; Qingliang Zhao; Bing Guo; Zhihao Gao

doi:10.1117/12.2520581

18 January 2019 An on-machine non-contact form measurement method for the high steepness elements

Xingtong Fei, Qingliang Zhao, Bing Guo, Zhihao Gao

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391Y (2019) https://doi.org/10.1117/12.2520581
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Due to the problem of spatial interference by the high steepness, the contact measuring device can’t measure the high steepness elements surface profile error. Based on the four-axis ultra-precision machine tools and laser micro-displacement sensor, this paper introuduces a method of the measurement experiment platform. It adjusts the geometrical relationship among the machine axes by laser micro- displacement sensor. The accuracy of the measuring device system error is obtained by the high precision standard ball’s measurement. It establishes the position and the error simulation in spherical coordinate system. Applying this measuring system, it can realize the accurate measurement of the dome part’s surface profile error which includes the measuring multiple bus lines and data fitting.

Citation Download Citation

Xingtong Fei, Qingliang Zhao, Bing Guo, and Zhihao Gao "An on-machine non-contact form measurement method for the high steepness elements", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391Y (18 January 2019); https://doi.org/10.1117/12.2520581

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