Research and development of light field microscope for measuring 3D microstructures

Panyu Zhou; Junhua Wang; Lingbao Kong; Min Xu

doi:10.1117/12.2504805

24 January 2019 Research and development of light field microscope for measuring 3D microstructures

Panyu Zhou, Junhua Wang, Lingbao Kong, Min Xu

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 1084016 (2019) https://doi.org/10.1117/12.2504805
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Precision measurement of three-dimensional (3D) microstructures has drawn great interests from researchers and industries. Currently there are a bunch of high precision measurement methods such as contour-graphs, interferometers and optical computed tomography used in industrial applications. Nonetheless, the loss of information, low efficiency and possible surface damaging of traditional ways still exist. This paper presents a new way to measure micro/nano structures based on light field microscope. The light field information of the microstructures is acquired by using a microlens array which is inserted between the camera sensor and the objective lens. Then a series of regular sub-images are recorded by the photosensor, which is used to reconstruct a 3D image by the developed algorithms. The non-contact shooting process is realized through only one exposure which is much more efficient than the traditional ways. Microlens array with aspheric surface is also designed and used in the developed system, to eliminate aberrations and compensate the loss of spatial resolution. A series of simulation and experimental studies have been undertaken to measure microstructures, and the feasibility of the developed system is validated.

Citation Download Citation

Panyu Zhou, Junhua Wang, Lingbao Kong, and Min Xu "Research and development of light field microscope for measuring 3D microstructures", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084016 (24 January 2019); https://doi.org/10.1117/12.2504805

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