Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating

Yuan Yao; Debin Pan; Anbing Geng; Haitao Wang; Jian Bai; Qianbo Lu; Peiwen Chen; Weidong Fang

doi:10.1117/12.2505677

12 December 2018 Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating

Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, Weidong Fang

Proceedings Volume 10848, Micro-Optics and MOEMS; 108480G (2018) https://doi.org/10.1117/12.2505677
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

The design and analysis method of a MOEMS accelerometer consisting of a grating interferometry cavity and a micromachined sensing chip is presented in this paper. The grating interferometeric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror ,to realize a subnanometer resolution. With an ultrasensitive micromachined chip, the MOEMS accelerometer can finally achieve a few ug resolution. This paper combines the geometrical optics and nano optics design methods to simulate the whole system, analyses how the divergence angle, grating constant and the length of the interferometeric cavity influence the ultimate sensitivity. A new set of MOEMS accelerometer is proposed, the theoretical analysis shows that the acceleration sensitivity can achieve 1200 v/g, and the resolution remains 1.3ug.

Citation Download Citation

Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, and Weidong Fang "Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating", Proc. SPIE 10848, Micro-Optics and MOEMS, 108480G (12 December 2018); https://doi.org/10.1117/12.2505677

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