Effects Of Subhalf Micron Mask Defects On Wafer Images During VLSI Circuit Production

T. Kikuchi; K. Shigematsu; M. Tominaga; H. Maruyama; T. Furukawa; K. Yanagida

doi:10.1117/12.953133

25 July 1989 Effects Of Subhalf Micron Mask Defects On Wafer Images During VLSI Circuit Production

T. Kikuchi, K. Shigematsu, M. Tominaga, H. Maruyama, T. Furukawa, K. Yanagida

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953133
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

Due to the ongoing development of submicron devices for mass production, the reticles used in the masters for forming patterns are being subjected to increasingly stricter quality requirements. For 5X reticles, even a minute defect less than 0.5um in size is transferred to the wafer. Moreover, a wide variety of defects must be detected and eliminated. There include complex pattern layout errors, substrate defects, and transparent foreign substance, as well as simple white or clear defects. Regarding the sizes of defects, recent improvements in defect inspection machine have made it possible to detect defects as small as 0.2um, yet it is evident that existing inspection technology is not able to cope with an array of new defects that were previouly not detected during the pre-submicron process.

Citation Download Citation

T. Kikuchi, K. Shigematsu, M. Tominaga, H. Maruyama, T. Furukawa, and K. Yanagida "Effects Of Subhalf Micron Mask Defects On Wafer Images During VLSI Circuit Production", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953133

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available