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Tunable photonic circuits were demonstrated by using ferroelectrics that had large electro-optic effect. The photonic circuits were fabricated by complementary metal–oxide–semiconductor (CMOS) technology thus enabling their integration with the present microelectronics for high speed signal modulation. From the scanning electron microscopy and energy-dispersive X-ray spectroscopy, we showed the photonic devices, including the optical waveguides, had sharp waveguide edges and interfaces. A sharp fundamental waveguide mode was observed over a broad spectral range. Tunability using Pockels effect were experimental results. Our device paves the way for ultra broadband integrated photonics critical for optical computing.
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Pao T. Lin, Tiening Jin, Junchao Zhou, "Mid-infrared optical waveguide using ferroelectric oxides (Conference Presentation)," Proc. SPIE 10919, Oxide-based Materials and Devices X, 109191V (8 March 2019); https://doi.org/10.1117/12.2508290