MEMS-in-the-lens 3D beam scanner for in vivo microscopy

David L. Dickensheets; Tianbo Liu; Milind Rajadhyaksha

doi:10.1117/12.2514579

4 March 2019 MEMS-in-the-lens 3D beam scanner for in vivo microscopy

David L. Dickensheets, Tianbo Liu, Milind Rajadhyaksha

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 1093110 (2019) https://doi.org/10.1117/12.2514579
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens. The scanner utilizes a silicon gimbal with SU-8 polymer flexures and deformable membrane mirror. The mirror aperture is 4 mm in diameter, and is capable of 9 μm deflection for focus control, with four annular electrodes to allow tuning of primary and secondary spherical aberration. The gimbal supports tip/tilt actuation up to ±3° for lateral beam scanning. We show confocal imaging using a benchtop mockup of the active lens, illustrating the potential for this approach to support 3D microscopy for optical biopsy applications.

Conference Presentation

Citation Download Citation

David L. Dickensheets, Tianbo Liu, and Milind Rajadhyaksha "MEMS-in-the-lens 3D beam scanner for in vivo microscopy", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093110 (4 March 2019); https://doi.org/10.1117/12.2514579

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