A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope

Benjamin W. Caplins; Jason D. Holm; Robert R. Keller

doi:10.1117/12.2508694

4 March 2019 A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope

Benjamin W. Caplins, Jason D. Holm, Robert R. Keller

Author Affiliations +

Proceedings Volume 10932, Emerging Digital Micromirror Device Based Systems and Applications XI; 109320E (2019) https://doi.org/10.1117/12.2508694
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Unit cell orientation information is encoded in electron diffraction patterns of crystalline materials. Traditional transmission electron detectors implemented in the scanning electron microscope are highly symmetric and are insensitive to in-plane unit cell orientation information. Herein we detail the implementation of a transmission electron detector that utilizes a digital micromirror array to select anisotropic portions of a diffraction pattern for imaging purposes. We demonstrate that this detector can be used to map the in-plane orientation of grains in two-dimensional materials. The described detector has the potential to replace and/or supplement conventional transmission electron detectors.

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Benjamin W. Caplins, Jason D. Holm, and Robert R. Keller "A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope", Proc. SPIE 10932, Emerging Digital Micromirror Device Based Systems and Applications XI, 109320E (4 March 2019); https://doi.org/10.1117/12.2508694

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