Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al0.05Ga0.95N distributed Bragg reflectors

Young Jae Park; Theeradetch Detchprohm; Karan Mehta; Jialin Wang; Hoon Jeong; Yuh-Shiuan Liu; Ping Chen; Shuo Wang; Shyh-Chiang Shen; P. Douglas Yoder; Fernando Ponce; Russell Dupuis

doi:10.1117/12.2510268

1 March 2019 Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors

Young Jae Park, Theeradetch Detchprohm, Karan Mehta, Jialin Wang, Hoon Jeong, Yuh-Shiuan Liu, Ping Chen, Shuo Wang, Shyh-Chiang Shen, P. Douglas Yoder, Fernando Ponce, Russell Dupuis

Author Affiliations +

Proceedings Volume 10938, Vertical-Cavity Surface-Emitting Lasers XXIII; 109380A (2019) https://doi.org/10.1117/12.2510268
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ~270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

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Citation Download Citation

Young Jae Park, Theeradetch Detchprohm, Karan Mehta, Jialin Wang, Hoon Jeong, Yuh-Shiuan Liu, Ping Chen, Shuo Wang, Shyh-Chiang Shen, P. Douglas Yoder, Fernando Ponce, and Russell Dupuis "Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors", Proc. SPIE 10938, Vertical-Cavity Surface-Emitting Lasers XXIII, 109380A (1 March 2019); https://doi.org/10.1117/12.2510268

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