EUV pellicle qualification on transmission and reflectance

Rainer Lebert; Christian Pampfer; Andreas Biermanns-Foeth; Thomas Missalla; Christoph Phiesel; Christian Piel

doi:10.1117/12.2515341

14 March 2019 EUV pellicle qualification on transmission and reflectance

Rainer Lebert, Christian Pampfer, Andreas Biermanns-Foeth, Thomas Missalla, Christoph Phiesel, Christian Piel

Proceedings Volume 10957, Extreme Ultraviolet (EUV) Lithography X; 109570Y (2019) https://doi.org/10.1117/12.2515341
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

RI Research Instrument’s EUV pellicle transmission qualification tool EUV-PTT uses “effective inband EUV measurement” which is spectrally filtering emission of the EUV-Lamp to 2% bandwidth at 13.5 nm for measuring “as seen by the scanner”. Images of about 20*20 mm² are recorded in < 5 seconds. A full pellicle characterization with < 60 images taken is accomplished in less than one hour. Recently, we have performed some studies on applying this technique to carbon nano tube pellicles and on measuring the reflectance of pellicles which will be reported. The latter is heavily demanding as reflectances in the range of 0.01 % were measured with sensitivities and reproducibilities in the range of 0.002 %.

Conference Presentation

Citation Download Citation

Rainer Lebert, Christian Pampfer, Andreas Biermanns-Foeth, Thomas Missalla, Christoph Phiesel, and Christian Piel "EUV pellicle qualification on transmission and reflectance", Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, 109570Y (14 March 2019); https://doi.org/10.1117/12.2515341

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