Paper
7 March 2019 Phase measuring method and error compensation in 3D profile measurement
Yan Zhang, Zili Zhang, Yueqiang Li, Weihu Zhou, Yang He, Wei Li
Author Affiliations +
Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110532X (2019) https://doi.org/10.1117/12.2512073
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China
Abstract
3D profile measurement is widely used in many areas such as manufacturing, computer-aided design, virtual reality and medical diagnostics. As one of the core technologies in 3D profile measurement, digital fringe pattern projection is a highly sensitive noncontact technique for obtaining the 3D shape of an object. Then the grating pattern deformed by the measured object is captured by CCD cameras and decoded using appropriate algorithms so that the shape of the object can be deduced. In this paper, three sets of phase shift fringe patterns with different frequencies are projected on the surface of the measured object by a DLP projector and the deformed patterns are captured by two cameras. Then the four-step phase shift method is used to obtain the three groups of fringe patterns phases, and the three-frequency heterodyne method is adopted to unwrap the phase and obtain the absolute phase. The causes of the phase errors are analyzed and the subsequent compensation method of gamma correction of grating pattern is proposed to eliminate the main errors. Experiments are carried out and the results verify the accuracy and effectiveness of the proposed methods.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yan Zhang, Zili Zhang, Yueqiang Li, Weihu Zhou, Yang He, and Wei Li "Phase measuring method and error compensation in 3D profile measurement", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110532X (7 March 2019); https://doi.org/10.1117/12.2512073
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KEYWORDS
Heterodyning

3D metrology

Phase shifts

Raster graphics

CCD cameras

Cameras

Error analysis

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