High resolution topography sensors in a multisenor measuring setup

Sebastian Hagemeier; Peter Lehmann

doi:10.1117/12.2525539

21 June 2019 High resolution topography sensors in a multisenor measuring setup

Sebastian Hagemeier, Peter Lehmann

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110563I (2019) https://doi.org/10.1117/12.2525539
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Due to the continuing trend to minimize micro structures on technical surfaces the requirements on measuring sensors are also increasing. This includes the lateral and axial resolution as well as the measuring speed. The latter is provided by using optical sensors like confocal microscopes, laser and coherence scanning interferometers. However, artifacts may occur in the measurement result leading to an erroneous reproduction of the surface to be measured. In order to investigate these artifacts and to optimize the setup of optical sensors the measuring results of different optical sensors can be compared among each other as well as with further sensors by using a multisensor measuring setup. Important characteristics of topography sensors are their axial accuracy and the lateral resolution. For this purpose, a standardized repeatability is determined for each sensor. In addition, measurements on technical surfaces to investigate the lateral resolution are presented.

Citation Download Citation

Sebastian Hagemeier and Peter Lehmann "High resolution topography sensors in a multisenor measuring setup", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110563I (21 June 2019); https://doi.org/10.1117/12.2525539

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