Effect of temperature on optical properties of CeOX film being irradiated by Co60 prepared by RF magnetron sputtering

Hui Wang; Bo Fu; Zaikui Xiang

doi:10.1117/12.2535797

8 July 2019 Effect of temperature on optical properties of CeO_X film being irradiated by Co⁶⁰ prepared by RF magnetron sputtering

Hui Wang, Bo Fu, Zaikui Xiang

Author Affiliations +

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640P (2019) https://doi.org/10.1117/12.2535797
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

The windows for the aerospace ship application is consist of fused silica and optical-films which can resist the ray-irradiation among the cosmos. For the optical-films produced by RF magnetron sputtering, the ray-irradiation anti-resist character is related with the sputtering temperature and the annealing temperature. As one of the high refractive index materials for the optical-design of the multi-layer optical film, CeO_x film were exposed to Co⁶⁰ irradiation of 10⁷ 、10⁸ 、and10⁹rad(Si) respectively. The spectrum- transmission line showed the optical character before and after the irradiation. Due to the decreasing of the defect among the film with the raising of the temperature ,the higher the sputtering and annealing temperature, the well anti-irradiation character. The transform of the Ce³⁺ and Ce4⁺ is beneficial for the optical character while the E^’ center can be moved from the visible-band to the ultraviolet band. But with the raising of the irradiation does, the micro-structure is key for the anti-irradiation character of the CeO_x film.

Citation Download Citation

Hui Wang, Bo Fu, and Zaikui Xiang "Effect of temperature on optical properties of CeO_X film being irradiated by Co⁶⁰ prepared by RF magnetron sputtering", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640P (8 July 2019); https://doi.org/10.1117/12.2535797

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