Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis

Yuchen Shao; Yuan'an Zhao; Hao Ma; Cheng Li; Dawei Li; Jianda Shao

doi:10.1117/12.2539750

8 July 2019 Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis

Yuchen Shao, Yuan'an Zhao, Hao Ma, Cheng Li, Dawei Li, Jianda Shao

Author Affiliations +

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640R (2019) https://doi.org/10.1117/12.2539750
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

Since negative photoresist SU-8 has become a common material for multi-photon micro-lithology, it is necessary to study laser conditions adopted in lithology process. Optical transmittance of SU-8 was tested. According to Urbach optical-absorption theory and Gaussian laser lateral spatial intensity envelope, relationship between theory and actual polymerization size of SU-8 was shown. Experimentally, we investigated multi-photon polymerization threshold and laser-induced damage of SU-8 under femtosecond laser irradiation with the pulse width of 45 fs at 800 nm by 1-on-1 tests. The polymerization and damage threshold at 45 fs are 2.7 and 8.9 TW/cm², respectively. Polymerization and damage morphologies are shown with high contrast and polymerization sizes are measured under SEM. Theoretical polymerization sizes versus laser fluence are calculated by laser-induce multi-photon polymerization size analysis (LMPSA), including Urbach optical-absorption theory and Gaussian laser lateral spatial intensity distribution. The calculated results show that diffusion exists in the femtosecond laser-induced polymerization.

Citation Download Citation

Yuchen Shao, Yuan'an Zhao, Hao Ma, Cheng Li, Dawei Li, and Jianda Shao "Efficient method for determination of laser conditions adopted in laser-induced micro-lithology based on laser polymerization size analysis", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640R (8 July 2019); https://doi.org/10.1117/12.2539750

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KEYWORDS

Polymerization

Absorption

Femtosecond phenomena

Photoresist materials

Laser damage threshold

Pulsed laser operation

Scanning electron microscopy

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