Electron Beam Testing Of LWIR Detectors

M. E. O'Brien; L. D. Flesner

doi:10.1117/12.960675

25 September 1989 Electron Beam Testing Of LWIR Detectors

M. E. O'Brien, L. D. Flesner

Proceedings Volume 1108, Test and Evaluation of Infrared Detectors and Arrays; (1989) https://doi.org/10.1117/12.960675
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

A scanning electron microscope (SEM) has been modified and conjoined with a cryogenic chamber to enable application of a focused electron beam to probe long-wavelength infrared (LWIR) detectors in a low IR photon environment. A beam blanker installed in the SEM allows the temporal as well as the spatial response of a detector to be measured. The apparatus has been applied to study the effects of ionizing radiation in Si impurity band detectors and HgCdTe detectors. Examples of these applications are presented.

Citation Download Citation

M. E. O'Brien and L. D. Flesner "Electron Beam Testing Of LWIR Detectors", Proc. SPIE 1108, Test and Evaluation of Infrared Detectors and Arrays, (25 September 1989); https://doi.org/10.1117/12.960675

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