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3 September 2019 Fabrication of integrated single-chip Fourier spectrometers
Roseanna G. Lawandi, Keigo Hirakawa, Partha Banerjee, Andrew M. Sarangan
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Proceedings Volume 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI; 110890V (2019) https://doi.org/10.1117/12.2529798
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States
Abstract
The goal of this work is to achieve an ultra-miniature spectrometer that has a footprint of less than 1mm x 1mm. The design is based on a novel technique known as Fourier spectral filtering. The sensor consists of a group of photodetectors integrated with different Fourier filters. Each filter, combined with the intrinsic spectral response of the silicon photodetector, was designed to have a unique sinusoidal transmission function. By utilizing multiple sinusoids and collecting the data from all of the detectors, a Fourier transform can be performed and the spectral content of the signal can be extracted.
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Roseanna G. Lawandi, Keigo Hirakawa, Partha Banerjee, and Andrew M. Sarangan "Fabrication of integrated single-chip Fourier spectrometers", Proc. SPIE 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 110890V (3 September 2019); https://doi.org/10.1117/12.2529798
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KEYWORDS
Photodetectors
Sensors
Silicon
Optical filters
Spectrometers
Optical lithography
Dielectrics
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