Paper
17 May 2019 Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide
Author Affiliations +
Proceedings Volume 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019); 111701Q (2019) https://doi.org/10.1117/12.2533464
Event: Fourteenth National Conference on Laser Technology and Optoelectronics, 2019, Shanghai, China
Abstract
In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.
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Jinsheng Ni, Mingyu Li, Jianjun He, and Chang Su "Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide", Proc. SPIE 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019), 111701Q (17 May 2019); https://doi.org/10.1117/12.2533464
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KEYWORDS
Waveguides

Silicon

Microrings

Resonators

Sensors

Optical sensors

Photonic integrated circuits

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