Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer

Daesuk Kim; Vamara Dembele

doi:10.1117/12.2536978

15 November 2019 Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer

Daesuk Kim, Vamara Dembele

Author Affiliations +

Proceedings Volume 11175, Optifab 2019; 111751L (2019) https://doi.org/10.1117/12.2536978
Event: SPIE Optifab, 2019, Rochester, New York, United States

Abstract

We describe a novel dynamic spectroscopic ellipsometer and its advanced imaging spectro-ellipsometric scheme based on one-piece polarizing interferometric module. The proposed dynamic spectroscopic ellipsometer requires neither moving parts nor time dependent polarization modulation for extracting spectroscopic ellipsometric parameters. By employing a snapshot single spectral data, we reconstruct spatially resolved spectral ellipsometric information of ultrathin films coated on a freeform surface with high precision and accuracy. The dynamic measurement capability of the proposed imaging spectro-ellipsometer is demonstrated for large-scale periodic nano-patterns fabricated on roll surface.

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Citation Download Citation

Daesuk Kim and Vamara Dembele "Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer", Proc. SPIE 11175, Optifab 2019, 111751L (15 November 2019); https://doi.org/10.1117/12.2536978

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