Development of the breathable frame for closed EUV pellicle

Akira Ishikawa; Hirofumi Tanaka; Yosuke Ono; Atsushi Okubo; Kazuo Kohmura

doi:10.1117/12.2533889

27 June 2019 Development of the breathable frame for closed EUV pellicle

Akira Ishikawa, Hirofumi Tanaka, Yosuke Ono, Atsushi Okubo, Kazuo Kohmura

Proceedings Volume 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology; 111780N (2019) https://doi.org/10.1117/12.2533889
Event: Photomask Japan 2019, 2019, Yokohama, Japan

Abstract

In this study, we have made a breathable frame (outer sizes: 151mm x 119mm, frame width: 4mm, and frame height: 1.3mm) which has the mounting space for filters and the ventilation path inside of the frame. The breathable frame is composed of stacked layers of stainless thin plates with cutouts/openings. The breathable frame has a HEPA filter with filtration area of 600mm² inside. For a closed pellicle which consists of the breathable frame and p-Si pellicle membrane, time required for intake to 101kPa from 1Pa with keeping the deflection of p-Si pellicle membrane to 0.5mm was calculated at 165sec. It seems that the developed breathable frame has the useful ventilation performance. Furthermore, because special processing for ventilation, such as formation of a ventilation path is not required on the pellicle membrane, it is expected that the closed pellicle can be made easily by combining the existing pellicle membrane with the breathable frame.

Citation Download Citation

Akira Ishikawa, Hirofumi Tanaka, Yosuke Ono, Atsushi Okubo, and Kazuo Kohmura "Development of the breathable frame for closed EUV pellicle", Proc. SPIE 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology, 111780N (27 June 2019); https://doi.org/10.1117/12.2533889

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