Paper
31 December 2019 Ablation control by applying magnetic and electric fields
Jovan Maksimovic, Tomas Katkus, Soon Hock Ng, Saulius Juodkazis
Author Affiliations +
Abstract
Laser fabrication with ultra-short laser pulses (sub-1 ps) have the ability for precise energy delivery to target materials for ablation, spallation or polymerisation down to sub-wavelength resolution. We show, that by applying electrical and magnetic fields, the electron-ion ablation plasma can be controlled following the Lorentz force exerted on to the plasma F = eE + e[v ×B], where v is velocity of charge e, E is the applied electrical bias and B is the magnetic flux density. The vectorial nature of the Lorentz force was investigated using the ablation of silicon. The application potential for ablation debris control and mass, charge spectroscopes of ablated materials is discussed.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jovan Maksimovic, Tomas Katkus, Soon Hock Ng, and Saulius Juodkazis "Ablation control by applying magnetic and electric fields", Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 1120106 (31 December 2019); https://doi.org/10.1117/12.2541090
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KEYWORDS
Laser ablation

Magnetism

Plasma

Ions

Silicon

Chemical analysis

Mass spectrometry

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