CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11281 > Article
Presentation
10 March 2020 Structure-property relationship in blade-coated amorphous In2O3 thin-film transistors (Conference Presentation)
Ahmad R. Kirmani, Emily F Roe, Lee J. Richter
Author Affiliations +
Proceedings Volume 11281, Oxide-based Materials and Devices XI; 112811F (2020) https://doi.org/10.1117/12.2545326
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
Metal oxide thin-film transistors (MOTFTs) are expected to play a vital role in enabling printed transparent, plastic electronics. Compatibility with plastics, however, requires MOTFTs to be scalably processed at low temperatures (T). Herein, we explore blade-coating of indium oxide (In2O3) TFTs via sol-gel and combustion chemistries. We find that the sol-gel process enables amorphous In2O3 TFTs at 200°C with moderate electronic mobility (ca. 1 cm2V-1s-1) which increases to 5 cm2V-1s-1 for 212°C. Combustion synthesis is found to bypass the electronically-active amorphous state leading to an early crystallization onset. Paradoxically, combustion TFTs are found to possess poor charge transport at low-T of 200-250°C. Early nucleation during combustion forms nanocrystalline domains that are deleterious to charge transport. Our results highlight that surprisingly it is not crystallization, rather the absence of it that is required to fabricate high-mobility, low-T bladed In2O3 TFTs.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Ahmad R. Kirmani, Emily F Roe, and Lee J. Richter "Structure-property relationship in blade-coated amorphous In2O3 thin-film transistors (Conference Presentation)", Proc. SPIE 11281, Oxide-based Materials and Devices XI, 112811F (10 March 2020); https://doi.org/10.1117/12.2545326
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Combustion
Thin films
Transistors
Coating
Chemistry
Crystals
Electronics
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top