Impact of light and ambient gas on the resistance of sputter-deposited non-doped ZnO films

Yasuhisa Omura; Shingo Sato

doi:10.1117/12.2550791

5 March 2020 Impact of light and ambient gas on the resistance of sputter-deposited non-doped ZnO films

Yasuhisa Omura, Shingo Sato

Proceedings Volume 11281, Oxide-based Materials and Devices XI; 112811N (2020) https://doi.org/10.1117/12.2550791
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

This paper demonstrates the impacts of light and ambient gas on the resistance of sputter-deposited non-doped ZnO films. Although the authors have already demonstrated the impact of light from various LEDs with a different wavelength on the resistance of such films, key results were not shown in detail. In this paper, the influence of ambient gas on the resistance and the influence of temperature on resistance are demonstrated in detail, and feasible physics drawn from analysis results are discussed. Physical images of the phenomena are proposed. It is also comprehensively revealed that the film surface condition significantly contributes to the transport characteristics of the film; this is supported by the impact of ambient gas in the dark on the current decay process in the film.

Conference Presentation

Citation Download Citation

Yasuhisa Omura and Shingo Sato "Impact of light and ambient gas on the resistance of sputter-deposited non-doped ZnO films", Proc. SPIE 11281, Oxide-based Materials and Devices XI, 112811N (5 March 2020); https://doi.org/10.1117/12.2550791

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