Long travel tip, tilt, z-stage (Conference Presentation)

Leonid Skigin; Roman Yasinov; Gal Peled; Alan Feinstein; Nir Karasikov

doi:10.1117/12.2546347

9 March 2020 Long travel tip, tilt, z-stage (Conference Presentation)

Leonid Skigin, Roman Yasinov, Gal Peled, Alan Feinstein, Nir Karasikov

Proceedings Volume 11287, Photonic Instrumentation Engineering VII; 112870T (2020) https://doi.org/10.1117/12.2546347
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Tip, Tilt, Z mechanisms are required in a diversity of applications including Semicon and Life-Science. A challenge is to realize a long travel design. Using Ultra Sonic Piezo motors, two long travel designs are demonstrated and analyzed. The challenges of achieving high stiffness and fast response are discussed. Accuracies in the nanometer linearly or micro radian angularly are attained. The stage design is modular and robust. Both vacuum and ambient pressure versions could be implemented. Experimental results are presented on positioning and scanning. The mechanism benefits further from previously developed capabilities with these motors: Vibration suppression by the motor itself, zero drift and fast response.

Conference Presentation

Citation Download Citation

Leonid Skigin, Roman Yasinov, Gal Peled, Alan Feinstein, and Nir Karasikov "Long travel tip, tilt, z-stage (Conference Presentation)", Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112870T (9 March 2020); https://doi.org/10.1117/12.2546347

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available