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Artificial subwavelength dielectric meta-lens (ML), realization of ultrathin and light-weight, provides a potential candidate to replace traditional bulky curved lens with high image quality. A ML with 1.5 mm in diameter having numerical aperture NA ~ 0.60 at the near-infrared wavelength λ = 0.94 μm was designed by finite-difference timedomain (FDTD) method with speeding up optimization of MLs’ scheme by deep neural network (DNN) model. Additionally, an ultra-thin high NA ML was achieved by cost effective semiconductor manufacturing technology. The fabricated ML can focus an incident light down to a spot as small as ~ 5.2 μm with high optical efficiency of ~88.4% (focusing efficiency achieved 23.7%). We also provided efficient MLs’ semiconductor manufacturing technology for the development of optical device in the near-infrared image technology.
K. F. Lin,C. C. Hsieh,S. C. Hsin, andW. F. Hsieh
"Achieving high numerical aperture near-infrared imaging based on an ultrathin cylinder dielectric metalens", Proc. SPIE 11290, High Contrast Metastructures IX, 112901O (26 February 2020); https://doi.org/10.1117/12.2542783
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K. F. Lin, C. C. Hsieh, S. C. Hsin, W. F. Hsieh, "Achieving high numerical aperture near-infrared imaging based on an ultrathin cylinder dielectric metalens," Proc. SPIE 11290, High Contrast Metastructures IX, 112901O (26 February 2020); https://doi.org/10.1117/12.2542783