Study on improvement of the accuracy of scanning electron microscope: energy dispersed spectroscopy quantitative analysis

Cong Cao; Jian Zhang; Mengmeng Dou; Dongsheng Zhao

doi:10.1117/12.2541537

13 November 2019 Study on improvement of the accuracy of scanning electron microscope: energy dispersed spectroscopy quantitative analysis

Cong Cao, Jian Zhang, Mengmeng Dou, Dongsheng Zhao

Author Affiliations +

Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 1134304 (2019) https://doi.org/10.1117/12.2541537
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

With the development of science and technology, scanning electron microscope - energy dispersed spectroscopy (SEM-EDS) with its advantages of convenience, easy operation and high reliability become the most widely used instrument in micro-beam analysis field. EDS sometimes is considered as a semi-quantitative or even qualitative instrument compared with WDS and other chemical methods in element type and composition analysis. However, SEM-EDS can provide accurate results if parameters are set properly. This paper discusses how to improve the accuracy of EDS quantitative analysis by changing SEM and EDS working conditions.

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Cong Cao, Jian Zhang, Mengmeng Dou, and Dongsheng Zhao "Study on improvement of the accuracy of scanning electron microscope: energy dispersed spectroscopy quantitative analysis", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134304 (13 November 2019); https://doi.org/10.1117/12.2541537

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