Coherence scanning interferometry with two polarization states

Pavel Pavliček; Jonatan Kučera; Nathan Hagen; Yukitoshi Otani

doi:10.1117/12.2542811

30 December 2019 Coherence scanning interferometry with two polarization states

Pavel Pavliček, Jonatan Kučera, Nathan Hagen, Yukitoshi Otani

Proceedings Volume 11385, Optics and Measurement International Conference 2019; 113850E (2019) https://doi.org/10.1117/12.2542811
Event: Optics and Measurement 2019 International Conference, 2019, Liberec, Czech Republic

Abstract

Coherence scanning interferometry (CSI) is a precise and versatile method to measure the shape of objects with rough and smooth surface. However, this method requires a large amount of raw data. The demands on increasing measurement speed and camera resolution require to reduce the number of camera frames. We present an evaluation technique that allows a direct reconstruction of the interferograms envelope. An octadical wave plate is inserted into the reference arm of the interferometer. Thus two signals arise, each for one polarization state, that are shifted by 90 degrees to each other. From the two signals, a direct reconstruction of the interferograms envelope is possible.

Citation Download Citation

Pavel Pavliček, Jonatan Kučera, Nathan Hagen, and Yukitoshi Otani "Coherence scanning interferometry with two polarization states", Proc. SPIE 11385, Optics and Measurement International Conference 2019, 113850E (30 December 2019); https://doi.org/10.1117/12.2542811

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