Silicon Photodiodes With Stable, Near-Theoretical Quantum Efficiency In The Soft X-Ray Region

Raj Korde; L. Randall Canfield

doi:10.1117/12.961812

27 November 1989 Silicon Photodiodes With Stable, Near-Theoretical Quantum Efficiency In The Soft X-Ray Region

Raj Korde, L. Randall Canfield

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961812
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Silicon photodiodes having practically no carrier recombination at the Si-SiO₂ interface or in the front diffused region have been developed by defect-free n-type impurity diffusion into p-type silicon. These photodiodes exhibit very high quantum efficiencies in the 10 eV to 150 eV photon energy region, typically 37 electrons per photon at 150 eV, which is about 300 times the quantum efficiency of the more commonly used photoemissive type soft X-ray detectors. The quantum efficiency of the developed diodes has been found to be stable to a few percent after exposure to photons in the region of 5eV to 200eV, with fluences in excess of 10¹⁴/cm². No significant change in the quantum efficiency was observed after storage in air for several months.

Citation Download Citation

Raj Korde and L. Randall Canfield "Silicon Photodiodes With Stable, Near-Theoretical Quantum Efficiency In The Soft X-Ray Region", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961812

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