Calibrating Teledyne-e2v’s ultraviolet image sensor quantum efficiency processes

Julian Heymes; Matthew Soman; Thomas Buggey; Chiaki Crews; George Randall; Alexander Gottwald; Andrew Harris; Andrew Kelt; Udo Kroth; Ian Moody; Xiao Meng; Oskar Ogor; Andrew Holland

doi:10.1117/12.2559711

13 December 2020 Calibrating Teledyne-e2v’s ultraviolet image sensor quantum efficiency processes

Julian Heymes, Matthew Soman, Thomas Buggey, Chiaki Crews, George Randall, Alexander Gottwald, Andrew Harris, Andrew Kelt, Udo Kroth, Ian Moody, Xiao Meng, Oskar Ogor, Andrew Holland

Author Affiliations +

Proceedings Volume 11454, X-Ray, Optical, and Infrared Detectors for Astronomy IX; 114541G (2020) https://doi.org/10.1117/12.2559711
Event: SPIE Astronomical Telescopes + Instrumentation, 2020, Online Only

Abstract

Teledyne-e2v’s sensors and wafer-scale processing are widely used for high performance imaging across soft X-ray and optical bands. In the ultraviolet spectral range, the combination of short absorption lengths (below 10 nm) and high reflectance (up to 75 %) can strongly limit the quantum efficiency. Direct detection capability relies on back-illumination and back-thinning processes to be applied to a sensor to remove dead layers from the optical path. As the thinning process leaves an unacceptably thick backside potential well as well as a highly reflective surface, in-house ultraviolet-specific (e.g. for WUVS) or third-party processes (e.g. delta-doping for FIREBall) are required. We have calibrated Teledyne-e2v’s latest in-house wafer-scale proprietary processes with monochromatic synchrotron radiation over a wide spectral range in the ultraviolet domain (λ=40 nm – 400 nm) at the Metrology Light Source of the Physikalisch-Technische Bundesanstalt. The first process is a shallow p+ implantation that permits the thinning of the backside potential well. It is available in two different levels: basic and enhanced. The second type of enhancement is a specific anti-reflective coating to increase the back-surface transmittance for distinct spectral ranges. In this paper, we will present comparative quantum efficiency calibration of both passivation stages and of two different ultraviolet specific anti-reflective coatings (applied on enhanced passivation devices). Also, their stability after intense ultraviolet illumination will be shown. These measurements will permit Teledyne-e2v to extend the quantum efficiency data of their most recent processes across the soft X-ray to near-infrared spectrum.

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Julian Heymes, Matthew Soman, Thomas Buggey, Chiaki Crews, George Randall, Alexander Gottwald, Andrew Harris, Andrew Kelt, Udo Kroth, Ian Moody, Xiao Meng, Oskar Ogor, and Andrew Holland "Calibrating Teledyne-e2v’s ultraviolet image sensor quantum efficiency processes", Proc. SPIE 11454, X-Ray, Optical, and Infrared Detectors for Astronomy IX, 114541G (13 December 2020); https://doi.org/10.1117/12.2559711

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