The simulation design and verification of integrated optical waveguide in silicon photonics

Wenliang Hu; Zhiqiang Qi; Haocheng Sun

doi:10.1117/12.2561164

17 April 2020 The simulation design and verification of integrated optical waveguide in silicon photonics

Wenliang Hu, Zhiqiang Qi, Haocheng Sun

Proceedings Volume 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications; 114551O (2020) https://doi.org/10.1117/12.2561164
Event: Sixth Symposium on Novel Photoelectronic Detection Technology and Application, 2019, Beijing, China

Abstract

Optical waveguide phased array has a lot of benefits, such as high speed scanning, low control power, low optical loss, small package size and high integration and so on. Many fields including pilotless driving, celestial navigation，medical diagnosis, optical communication, can use this new type of all solid scanning device to improve their performance. In this paper, we conduct the theory simulation about the device design of the silicon waveguide phased array system and the main contents include these following researches. Firstly the simulation results about the local optical field under the TE mode of silicon optical waveguide based on SOI prove that our silicon-based optical waveguide has low electromagnetic wave loss. Secondly the input grating coupler for spatial light-towaveguide transmission is designed and the propagation direction and intensity distribution of the light field in the grating coupler are obtained, which indicates the coupling efficiency is more than 50%. Also the multi-mode interferometer structure design and optimization for multi-element phased array beam splitting are carried out, and the output intensity reaches 90%. Finally, the power of the heating electrode Ti is designed to meet the temperature requirement of phase shift at 360K.

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Wenliang Hu, Zhiqiang Qi, and Haocheng Sun "The simulation design and verification of integrated optical waveguide in silicon photonics", Proc. SPIE 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications, 114551O (17 April 2020); https://doi.org/10.1117/12.2561164

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KEYWORDS

Waveguides

Silicon

Phased array optics

Electrodes

Integrated optics

Brain-machine interfaces

Phase shifts

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