Metrology with atomic-scale localization errors by optical-image cross-correlation analysis

Tobias Frenzel; Julian Köpfler; Andreas Naber; Martin Wegener

doi:10.1117/12.2566282

20 August 2020 Metrology with atomic-scale localization errors by optical-image cross-correlation analysis

Tobias Frenzel, Julian Köpfler, Andreas Naber, Martin Wegener

Proceedings Volume 11460, Metamaterials, Metadevices, and Metasystems 2020; 1146006 (2020) https://doi.org/10.1117/12.2566282
Event: SPIE Nanoscience + Engineering, 2020, Online Only

Abstract

Using superoscillations from a nanostructured Pancharatnam-Berry-phase metasurface serving as a marker, and four different polarization states of an incident laser, a recent paper (Science 364, 771 (2019)) reported 1nm localization errors at 800nm vacuum wavelength. Here, we show experimentally (unpublished) that digital optical-image cross-correlation analysis can achieve localization errors of 0.09nm with 12.5ms time resolution for similar marker footprints. Our approach uses incoherent unpolarized white light rather than a laser for illumination and works even for bare sample surfaces. Using time-harmonic modulation and synchronized stroboscopic illumination, we have taken nanometric movies at frequencies around 100kHz (Nature Commun. 10, 3384 (2019)).

Conference Presentation

Citation Download Citation

Tobias Frenzel, Julian Köpfler, Andreas Naber, and Martin Wegener "Metrology with atomic-scale localization errors by optical-image cross-correlation analysis", Proc. SPIE 11460, Metamaterials, Metadevices, and Metasystems 2020, 1146006 (20 August 2020); https://doi.org/10.1117/12.2566282

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available