Free standing Au membrane with designed nano-holes fabricated using nanospherical-lens lithography for surface-enhanced infrared absorption spectroscopy

Yu-Ling Sun; Chi-Ching Liu; Chia-Yi Lin; Bo-Lin Lin; Yun-Chorng Chang

doi:10.1117/12.2567903

16 August 2020 Free standing Au membrane with designed nano-holes fabricated using nanospherical-lens lithography for surface-enhanced infrared absorption spectroscopy

Yu-Ling Sun, Chi-Ching Liu, Chia-Yi Lin, Bo-Lin Lin, Yun-Chorng Chang

Author Affiliations +

Proceedings Volume 11462, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVIII; 1146227 (2020) https://doi.org/10.1117/12.2567903
Event: SPIE Nanoscience + Engineering, 2020, Online Only

Conference Poster

Abstract

In this study, we will demonstrate the fabrication of a free-standing Au membrane with designed nano-patterns using Nanospherical-Lens Lithography. First, we will fabricate the Au membrane with designed nano-holes on top of the photoresist thin film. Then, the Au membrane is released in solvent and recovered on top of another thick metal membrane with larger holes. The surface plasmon resonance of the designed nano-holes is in the spectral range of mid infrared, which should be able to demonstrate surface-enhanced infrared absorption spectrum. We are currently measuring several IR-active molecules to demonstrate surface enhanced infrared absorption.

Citation Download Citation

Yu-Ling Sun, Chi-Ching Liu, Chia-Yi Lin, Bo-Lin Lin, and Yun-Chorng Chang "Free standing Au membrane with designed nano-holes fabricated using nanospherical-lens lithography for surface-enhanced infrared absorption spectroscopy", Proc. SPIE 11462, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVIII, 1146227 (16 August 2020); https://doi.org/10.1117/12.2567903

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