Error sources, compensation, and probe path optimization for on-machine metrology of freeform optics

Laura Hopper; Todd Noste; Jimmie Miller; Chris Evans

doi:10.1117/12.2568797

20 August 2020 Error sources, compensation, and probe path optimization for on-machine metrology of freeform optics

Laura Hopper, Todd Noste, Jimmie Miller, Chris Evans

Proceedings Volume 11487, Optical Manufacturing and Testing XIII; 1148709 (2020) https://doi.org/10.1117/12.2568797
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

As on-machine metrology for freeform optics becomes increasingly popular, error analysis and compensation techniques and probe path optimization must evolve in response. For this work, a four axis Moore Nanotech Universal Measuring Machine (based on a diamond turning machine design) is used with a Precitec chromatic confocal probe. The system is set up in a thermally controlled enclosure, and a LabVIEW data acquisition program is used to record probe data, time, and machine positioning data directly from the machine scales. Issues addressed include probe testing and calibration, thermal errors, data age, compensation methods, and probe path optimization for error reduction. The combined error reduction/compensation approach improves on-machine metrology for freeform optics.

Conference Presentation

Citation Download Citation

Laura Hopper, Todd Noste, Jimmie Miller, and Chris Evans "Error sources, compensation, and probe path optimization for on-machine metrology of freeform optics", Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 1148709 (20 August 2020); https://doi.org/10.1117/12.2568797

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available