Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Jan Kredba; Marek Stašík; Marek Mach; Ondřej Matoušek; Vasyl Karabyn

doi:10.1117/12.2568732

21 August 2020 Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Jan Kredba, Marek Stašík, Marek Mach, Ondřej Matoušek, Vasyl Karabyn

Author Affiliations +

Proceedings Volume 11490, Interferometry XX; 1149010 (2020) https://doi.org/10.1117/12.2568732
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Conference Poster

Abstract

Plane-parallel optical elements, such as optical resonators, laser rods or wave plates, are widely used in many optical setups. Both planar surfaces of the element have to be manufactured with high precision in order to assure proper quality of the element and thus these surfaces have to be accurately measured. However, the interferometric measurement process, usually used for the surface form topography characterization, suffers from multiple interference patterns. This increases the total measurement error. In this paper the frequency-tuned interferometric method, that overcomes this problem, is demonstrated and compared to commonly used techniques using immersion liquid. Using a tunable laser source together with a frequency separation of the phase information from both surfaces, fringes from the first and second surface can be distinguished. Also, the interference between both surfaces can be used to obtain the wedge and thickness values of the specimen.

Citation Download Citation

Jan Kredba, Marek Stašík, Marek Mach, Ondřej Matoušek, and Vasyl Karabyn "Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry", Proc. SPIE 11490, Interferometry XX, 1149010 (21 August 2020); https://doi.org/10.1117/12.2568732

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available