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The advanced light source including Free Electron Laser (FEL) and Synchrotron Radiation Facility, active X-ray optics is very important for X-ray transport with high efficiency in beamlines, which has been proved by the decade’s development and application of bimorph mirrors. In this report, we report a new type of X-ray active optics - the deformable mirror based on thermal-heat effect. Simulation results shows that the mirror provides high spatial resolution over traditional bimorph mirror. In addition, the features of simple process and low cost make it possible to reduce high quality requirement on other X-ray optics.
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Fugui Yang, Ye Zhu, Lidan Gao, Yinglei Tan, Ming Li, Xiaowei Zhang, "Thermal deformable mirror for x-ray wavefront correction in advanced light source application," Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 114910H (21 August 2020); https://doi.org/10.1117/12.2567483