Paper
26 August 2020 Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives
Author Affiliations +
Abstract
Over more than 50th years Thales SESO represent a world leading designer and manufacturer of high-end, optical components such as telescopes and satellite-based space observation optics operating over the entire spectral range from infrared to x-ray wavelengths. Since early 90th we are actively working in the EUV, Soft-X-ray and hard X-ray spectral range, by developing new equipment and introducing metrology innovations and brand new patented products such as bender and bimorphs mirrors (1st and 2nd generation). In particular a set of customized solution and integrated system for imaging and spectroscopy have been developed basing on the original Wolter and Kirckpatrick-Baez design. Few example of reflective optics behaving both, as collimator, focusing and imaging device are discussed in this paper. A set of solutions to realize fixed curvature optics and dynamically bended device will be detailed to illustrate the flexibility and performances of these products..
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Luca Peverini, H. Guadalupi, T. Michel, S. Perrin, R. Neviere, and Christian du Jeu "Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920H (26 August 2020); https://doi.org/10.1117/12.2570604
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KEYWORDS
Reflectivity

Imaging spectroscopy

Imaging systems

Metrology

Mirrors

Extreme ultraviolet

Hard x-rays

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