Damage precursor mitigation towards enhanced laser resistance of ultraviolet antireflective coatings

Thimotheus Alig; Heinrich Mädebach; Nils Bartels; Paul Allenspacher; Istvan Balasa; Tammo Böntgen; Detlev Ristau; Lars Jensen

doi:10.1117/12.2571114

11 September 2020 Damage precursor mitigation towards enhanced laser resistance of ultraviolet antireflective coatings

Thimotheus Alig, Heinrich Mädebach, Nils Bartels, Paul Allenspacher, Istvan Balasa, Tammo Böntgen, Detlev Ristau, Lars Jensen

Author Affiliations +

Proceedings Volume 11514, Laser-induced Damage in Optical Materials 2020; 115140Z (2020) https://doi.org/10.1117/12.2571114
Event: SPIE Laser Damage, 2020, Online Only

Abstract

Spaceborne LIDAR systems with high power laser optics enable advanced understanding of the climate change. However, nano-scaled particles originating from film deposition processes reduce the laser-induced damage threshold. A secondary ion source is used to remove the particles that settle on the surface of the growing film. A second option is to remove precursors by laser irradiation before they are covered with additional layers. To verify the impact on the defect mitigation, laser-induced damage threshold tests and raster scan tests were conducted. This work has been carried under the ESA contract AO 1-8683/16/NL/BJ activity with name “Particle mitigation in high power laser optics”.

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Thimotheus Alig, Heinrich Mädebach, Nils Bartels, Paul Allenspacher, Istvan Balasa, Tammo Böntgen, Detlev Ristau, and Lars Jensen "Damage precursor mitigation towards enhanced laser resistance of ultraviolet antireflective coatings", Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 115140Z (11 September 2020); https://doi.org/10.1117/12.2571114

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