Surface Roughness And Oxide Layers Of Sputtered Polycrystalline Films

R. Rohlsberger; M. Grote; U. Bergmann; E. Gerdau; R. Hollatz; R. Ruffer; H. D. Ruter; W. Sturhahn; M. Harsdorff; W. Pfutzner

doi:10.1117/12.962624

28 July 1989 Surface Roughness And Oxide Layers Of Sputtered Polycrystalline Films

R. Rohlsberger, M. Grote, U. Bergmann, E. Gerdau, R. Hollatz, R. Ruffer, H. D. Ruter, W. Sturhahn, M. Harsdorff, W. Pfutzner

Author Affiliations +

Proceedings Volume 1160, X-Ray/EUV Optics for Astronomy and Microscopy; (1989) https://doi.org/10.1117/12.962624
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The X-ray-optical performance of sputtered polycrystalline films in grazing incidence geometry is influenced by their surface roughness and the presence of oxide layers. The surface roughness of the films has been characterized by transmission electron microscopical ( TEM) techniques. A relation between the measured X- ray reflectivity and the microtopographic features seen in the TEM has been found. Rockingcurves of Ta- and Fe-films are influenced by oxide layers. Thin oxide layers produce an additional amplitude modulation in the reflectivity, from which the density and the thickness of the oxide layers can be derived with high accuracy.

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R. Rohlsberger, M. Grote, U. Bergmann, E. Gerdau, R. Hollatz, R. Ruffer, H. D. Ruter, W. Sturhahn, M. Harsdorff, and W. Pfutzner "Surface Roughness And Oxide Layers Of Sputtered Polycrystalline Films", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962624

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