Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

John E. Greivenkamp; Kevin G. Sullivan; Russell J. Palum

doi:10.1117/12.962809

20 December 1989 Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

John E. Greivenkamp, Kevin G. Sullivan, Russell J. Palum

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962809
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Citation Download Citation

John E. Greivenkamp, Kevin G. Sullivan, and Russell J. Palum "Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962809

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