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5 March 2021 Single shot deposition of nanodot array by laser-induced forward transfer using interference pattern
Yoshiki Nakata, Eiki Hayashi, Koji Tsubakimoto, Hiroyuki Shiraga, Aiko Narazaki, Tatsuya Shoji, Kenta Ushiro, Yasuyuki Tsuboi
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Proceedings Volume 11674, Laser-based Micro- and Nanoprocessing XV; 116740S (2021) https://doi.org/10.1117/12.2587150
Event: SPIE LASE, 2021, Online Only
Abstract
Laser-induced forward transfer (LIFT) is a direct-writing technique enabling deposition of a film. In addition, a single dot smaller than the laser wavelength can be deposited at small shot energy, and the case is called as laser-induced dot transfer (LIDT). In conventional LIDT experiments, multi-shots with step scanning have been used to form array structures, which are useful in plasmonics, pho-chemistry, light harvest, etc.. On the other hand, interference laser processing can achieve an arrayed process and generate a periodic structure in a single shot. In this presentation, the results of LIDT technique which uses a femtosecond laser interference pattern will be presented. As a result, an array of Au nanodots with 3.6 m period was successfully deposited, producing the following unit structures: a single dot, adjoining dots, and stacking dots. This new technique produces high-purity, catalyst-free nanodots in array that do not require post-cleaning or alignment processes.
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Yoshiki Nakata, Eiki Hayashi, Koji Tsubakimoto, Hiroyuki Shiraga, Aiko Narazaki, Tatsuya Shoji, Kenta Ushiro, and Yasuyuki Tsuboi "Single shot deposition of nanodot array by laser-induced forward transfer using interference pattern", Proc. SPIE 11674, Laser-based Micro- and Nanoprocessing XV, 116740S (5 March 2021); https://doi.org/10.1117/12.2587150
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KEYWORDS
Array processing
Femtosecond phenomena
Gold
Laser processing
Light harvesting
Plasmonics
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