Photonic mixer device (PMD) based on graphene for high-resolution 3D sensors

Paul Kienitz; Andreas Bablich; Rainer Bornemann; Peter Haring Bolívar

doi:10.1117/12.2576775

5 March 2021 Photonic mixer device (PMD) based on graphene for high-resolution 3D sensors

Paul Kienitz, Andreas Bablich, Rainer Bornemann, Peter Haring Bolívar

Proceedings Volume 11688, 2D Photonic Materials and Devices IV; 116880S (2021) https://doi.org/10.1117/12.2576775
Event: SPIE OPTO, 2021, Online Only

Abstract

Compact, highly accurate and fast optical systems for three-dimensional image acquisition are becoming increasingly important in various future relevant applications. A special optoelectronic detector that can be used for distance measurement is the Photonic Mixer Device (PMD). We developed a graphene-based PMD, which benefits from the advantages of graphene (high charge carrier mobility and broadband absorption spectrum) and results in a broadband PMD with enhanced depth resolution. Our graphene PMD has a mirror-symmetrical design and combines two photodetectors in such a way that they have a common source contact made of palladium and two separate drain contacts made of titanium. The charge carrier swing, which is the main feature of a standard PMD, is realized via two separate buried gate contacts. Two versions of the graphene PMD, one silicon-substrate based and the other glass-substrate based, were fabricated. The fabrication steps as well as measurements of the electrical behavior and the photocurrent of the manufactured graphene PMDs are presented.

Conference Presentation

Citation Download Citation

Paul Kienitz, Andreas Bablich, Rainer Bornemann, and Peter Haring Bolívar "Photonic mixer device (PMD) based on graphene for high-resolution 3D sensors", Proc. SPIE 11688, 2D Photonic Materials and Devices IV, 116880S (5 March 2021); https://doi.org/10.1117/12.2576775

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available