Presentation
8 March 2021 Optical gas sensing in the mid-IR using suspended silicon waveguides
Kristinn B. Gylfason, Floria Ottonello-Briano, Carlos Errando-Herranz, Henrik Rödjegård, Hans Martin, Hans Sohlström
Author Affiliations +
Abstract
Optical spectroscopy is among the most important chemical analysis techniques, due to its high specificity and long-term stability. For spectroscopic analysis of gas compositions, the mid infrared (mid-IR) region is particularly important, owing to the rovibrational resonances in that spectral range. Hence, there is great interest in miniaturizing and reducing the power consumption of optical spectroscopic sensors, but until recently the mid-IR range has been out of reach. We demonstrate spectroscopic sensing of carbon dioxide using an integrated silicon waveguide at the strong absorption peak at 4.23 µm wavelength. We show different measurement principles that leverage the power of integrated optics in innovative ways.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kristinn B. Gylfason, Floria Ottonello-Briano, Carlos Errando-Herranz, Henrik Rödjegård, Hans Martin, and Hans Sohlström "Optical gas sensing in the mid-IR using suspended silicon waveguides", Proc. SPIE 11689, Integrated Optics: Devices, Materials, and Technologies XXV, 116890A (8 March 2021); https://doi.org/10.1117/12.2580648
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KEYWORDS
Mid-IR

Silicon

Waveguides

Optical sensing

Integrated optics

Spectroscopy

Carbon

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