High contrast grating has been demonstrated in VCSELs for over one decade with wavelengths in 850nm, 940nm, 980nm, 1050nm, 1300nm and 1550nm. Several device configurations were reported with HCG freely suspended as MEMS structure, monolithic with AlOx layer, flip-chip bonded onto a Si/SiO2 HCG and with a deposited thin film Si/SiO2. Wavelength swept VCSELs and multi-wavelength VCSELs were also published. In this talk, we will review all different results. We will particularly address polarization and far field pattern engineering. New applications in high speed modulation, 3D sensing and LIDAR will be discussed.
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