Fabrication of spectral differential four channel microfiltration array

Guang-yi Xiao; Huan Zhang; Xiao-li Xie; Sheng-li Chang; Jing-yue Fang

doi:10.1117/12.2586298

12 March 2021 Fabrication of spectral differential four channel microfiltration array

Guang-yi Xiao, Huan Zhang, Xiao-li Xie, Sheng-li Chang, Jing-yue Fang

Proceedings Volume 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications; 117631Q (2021) https://doi.org/10.1117/12.2586298
Event: Seventh Symposium on Novel Photoelectronic Detection Technology and Application 2020, 2020, Kunming, China

Abstract

A microfilter array based on the principle of spectral difference is prepared to improve the signal-to-noise ratio by eliminating the background. Based on the design of Fabry-Perot periodic multilayer medium film, the narrow-band filter with the central wavelength of 589nm, the bandwidth is about 3.2nm, the transmittance is 60%, and cutoff OD3 was prepared. A filter array with unit size of 11 μm × 11 μm and size of 2048×2048 was prepared by pixelating the optical narrow-band interference film by ultraviolet lithography and reactive ion etching. The microregion of filter array is measured by fiber optic spectrometer and atomic force microscope. The results show that the filter array is accurate and effective for the regulation of Fabry-Perot cavity, and the filter periodic structure of 2×2 is realized.

Citation Download Citation

Guang-yi Xiao, Huan Zhang, Xiao-li Xie, Sheng-li Chang, and Jing-yue Fang "Fabrication of spectral differential four channel microfiltration array", Proc. SPIE 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications, 117631Q (12 March 2021); https://doi.org/10.1117/12.2586298

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available